发明名称 |
Optical method and apparatus for inspecting large area planar objects |
摘要 |
An optical inspection module is provided for detecting defects on a substrate having first and second opposite planar surfaces. The module includes a substrate holding position and first and second measurement instruments. The first instrument includes a first illumination path extending to the substrate holding position and having a grazing angle of incidence with the first surface, which illuminates substantially the entire first surface. A first optical element is oriented to collect non-specularly reflected light scattered by the first surface. A first photodetector has a plurality of pixels positioned within a focal plane of the first lens, which together form a field of view that covers substantially the entire first surface. The second instrument includes a sensor oriented for sensing a physical characteristic of the second surface when the substrate is held in the substrate holding position and the first surface is being illuminated.
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申请公布号 |
US6809809(B2) |
申请公布日期 |
2004.10.26 |
申请号 |
US20030379016 |
申请日期 |
2003.03.04 |
申请人 |
REAL TIME METROLOGY INC |
发明人 |
KINNEY PATRICK D;GUPTA ANAND;RAO NAGARAJA P |
分类号 |
G01N21/95;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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