CENTERING APPARATUS TO SIMPLIFY FABRICATING PROCESS BY PERFORMING ELASTIC CENTERING PROCESS ON WAFERS

摘要

PURPOSE: A centering apparatus is provided to simplify a fabricating process by performing an elastic centering process on wafers of various sizes and by making the centering apparatus built in each process unit. CONSTITUTION: A wafer plate on which a wafer is placed is included in a main body. When the wafers of different sizes are located, a vertical operating unit(30) installed in the wafer plate moves up/down to control the height of the wafer. A horizontal pressure unit(40) horizontally moves with respect to the circumference of the wafer to fix the wafer so that the wafers of different types can be centered by the elevation of the vertical operating unit.