| 摘要 |
PURPOSE: A surface pressure distribution sensor is provided to precisely detect fine variation of capacitance by detecting surface pressure distribution based upon the variation of capacitance of a crossing part of a row interconnection and a column interconnection. CONSTITUTION: A plurality of conductors run in parallel with each other in a row interconnection(14), extending in the first direction. A plurality of conductors run in parallel with each other in a column interconnection(17), extending in the second direction crossing the first direction. The row interconnection and the column interconnection are formed on a substrate. At least a part of the substrate is made of a flexible film substrate(16). The surface pressure distribution is detected based upon the variation of the capacitance of a crossing part of the row interconnection and the column interconnection.
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