发明名称 |
Apparatus and methods for thermal reduction of optical distortion |
摘要 |
Apparatus and methods for reducing optical distortion in an optical system by thermal means are disclosed. The apparatus includes a heating/cooling system spaced apart from and in thermal communication with an internally reflecting surface of a refractive element in the optical system. The heating/cooling system is adapted to create a select temperature distribution in the refractive optical element near the internally reflecting surface to alter the refractive index and/or the surface profile in a manner that reduces residual distortion.
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申请公布号 |
US6809888(B1) |
申请公布日期 |
2004.10.26 |
申请号 |
US20030418591 |
申请日期 |
2003.04.16 |
申请人 |
ULTRATECH, INC. |
发明人 |
MARKLE DAVID A. |
分类号 |
G02B7/18;G03F7/20;(IPC1-7):G02B17/00;G03B27/68 |
主分类号 |
G02B7/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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