发明名称 Apparatus and methods for thermal reduction of optical distortion
摘要 Apparatus and methods for reducing optical distortion in an optical system by thermal means are disclosed. The apparatus includes a heating/cooling system spaced apart from and in thermal communication with an internally reflecting surface of a refractive element in the optical system. The heating/cooling system is adapted to create a select temperature distribution in the refractive optical element near the internally reflecting surface to alter the refractive index and/or the surface profile in a manner that reduces residual distortion.
申请公布号 US6809888(B1) 申请公布日期 2004.10.26
申请号 US20030418591 申请日期 2003.04.16
申请人 ULTRATECH, INC. 发明人 MARKLE DAVID A.
分类号 G02B7/18;G03F7/20;(IPC1-7):G02B17/00;G03B27/68 主分类号 G02B7/18
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