发明名称 Isolated frame caster
摘要 Methods and apparatus for reducing the transmission of vibrations within a caster system that supports a stage apparatus with a reaction frame are disclosed. According to one aspect of the present invention, a caster system that support portions of a stage apparatus which has a reaction frame and a stage assembly includes a first caster component and at least a second caster component. The first caster component supports the stage assembly, while the second caster component supports the reaction frame and is vibrationally separated from the first caster component. The second caster component may be physically coupled to the first caster component to enable the first caster component, the second caster component, the reaction frame, and the stage assembly to be moved as a substantially single unit.
申请公布号 US6809323(B2) 申请公布日期 2004.10.26
申请号 US20020116428 申请日期 2002.04.03
申请人 NIKON CORPORATION 发明人 HAZELTON ANDREW J.
分类号 G03F7/20;(IPC1-7):E21K5/10 主分类号 G03F7/20
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