发明名称 |
Methods and apparatus for dishing and erosion characterization |
摘要 |
The present invention includes a system for efficient and effective detection and characterization of dishing and/or erosion. An x-ray emission inducer is used to scan a target on a sample. The target can be scanned at an acute incident angle to allow characterization of the dishing and/or erosion and analysis of the metallization or thin film layer topology.
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申请公布号 |
US6810105(B2) |
申请公布日期 |
2004.10.26 |
申请号 |
US20020242496 |
申请日期 |
2002.09.12 |
申请人 |
KLA TENCOR TECH CORP |
发明人 |
NASSER-GHODSI MEHRAN;WOOD PHIL |
分类号 |
G01N23/225;(IPC1-7):G01N23/223 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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