发明名称 |
Correlating an inline parameter to a device operation parameter |
摘要 |
A method and an apparatus for dynamic targeting for a process control system. Inline parameter data relating to a processed workpiece is received. A determination is made whether the inline parameter would result in a value of a device operation parameter within a predetermined range. At least one process operation performed upon the workpiece is adjusted in response to a determination that the inline parameter would not result in a value of the device operation parameter.
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申请公布号 |
US6810296(B2) |
申请公布日期 |
2004.10.26 |
申请号 |
US20020254209 |
申请日期 |
2002.09.25 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
BODE CHRISTOPHER A.;CHERRY GREGORY A.;GOOD RICK |
分类号 |
H01L21/66;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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