Method for the calibration and alignment of multiple multi-axis motion stages for optical alignment to a planar waveguide device and system

摘要

An optical system for detecting and coupling light to optical devices, and a method for aligning and calibrating the system. The system includes positioning stages and fiber sensors. The fiber sensors are used to detect the positions of calibration pieces and other sensors in a variety of configurations. From these detected positions, any misalignment of the sensors or positioning stages may be calculated and corrected for. The fiber sensors calibrate the system.