发明名称 Method and apparatus for high density nanostructures
摘要 A method and apparatus for high density nanostructures is provided. The method and apparatus include Nano-compact optical disks, such as nano-compact disks (Nano-CDS). In one embodiment a 400 Gbit/in<2 >topographical bit density nano-CD with nearly three orders of magnitude higher than commercial CDS has been fabricated using nanoimprint lithography. The reading and wearing of such Nano-CDS have been studied using scanning proximal probe methods. Using a tapping mode, a Nano-CD was read 1000 times without any detectable degradation of the disk or the silicon probe tip. In accelerated wear tests with a contact mode, the damage threshold was found to be 19 muN. This indicates that in a tapping mode, both the Nano-CD and silicon probe tip should have a lifetime that is at least four orders of magnitude longer than that at the damage threshold.
申请公布号 US6809356(B2) 申请公布日期 2004.10.26
申请号 US20020301476 申请日期 2002.11.21
申请人 REGENTS OF THE UNIVERSITY OF MINNESOTA 发明人 CHOU STEPHEN Y.
分类号 B29C33/60;G03F7/00;(IPC1-7):H01L27/148 主分类号 B29C33/60
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