发明名称 Sapphire single crystal, semiconductor laser diode using the same for substrate, and method for manufacturing the same
摘要 The present invention relates to a sapphire monocrystalline body to be used as the substrate for a semiconductor for electronic parts or component parts, and to a monocrystalline sapphire substrate. The invention also relates to a method for working the same. The invention is based cleavage along the plane R of the sapphire monocrystalline body which cleavage is easy to accomplish and provides a surface high in precision. The inventive process includes forming linear crack parallel or vertical to a reference plane of the substrate, with a microcrack line as a starting point, to develop a crack in a thickness direction of the body.
申请公布号 US6809010(B1) 申请公布日期 2004.10.26
申请号 US19970808315 申请日期 1997.02.28
申请人 KYOCERA CORP 发明人 KINOSHITA HIROYUKI;UMEHARA MOTOHIRO
分类号 C30B33/00;H01S5/02;H01S5/32;H01S5/323;(IPC1-7):H01L21/78;H01S5/00 主分类号 C30B33/00
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