发明名称 |
Method for improving a high-speed edge-coupled photodetector |
摘要 |
An edge-coupled photodetector, especially a compound semiconductor edge-coupled photodetectors, has a light funnel integrated right in front of the coupling aperture for enhancing the optical coupling efficiency. The light funnel is formed utilizing either a wet etched, crystallographically defined semiconductor slope or a dry etched, resist-profile-defined semiconductor slope covered by the planarized dielectrics. The funnel internals can be partially or fully metallized for total mirror reflection. The lightwave entering the funnel and propagating along the optical axis converges through mirror reflection or total internal reflection. Through such an invention, the edge-coupled photodetector can have both high operation speed and high quantum efficiency with enlarged alignment tolerance.
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申请公布号 |
US6808957(B1) |
申请公布日期 |
2004.10.26 |
申请号 |
US20030630935 |
申请日期 |
2003.07.31 |
申请人 |
CHUNGHWA TELECOM CO., LTD. |
发明人 |
HO CHONG-LONG;LIN GONG-CHENG;LIU I-MING;LIN CHIA-JU;CHEN YAO-SHING;HO WEN-JENG;LIAW JY-WANG |
分类号 |
H01L21/00;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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