AIR PURIFICATION FILTER ASSEMBLY USING ION EXCHANGE RESIN AND NON WOVEN FABRICS FOR REMOVAL OF HAZARDOUS ION GAS GENERATED IN WAFER PRODUCTION

摘要

PURPOSE: An air purification filter assembly using ion exchange resin and non woven fabrics is provided to remove of hazardous ion gas generated in wafer production. CONSTITUTION: The air purification filter assembly comprises a filtering member(10) prepared by laminating one or more plates(11), where many small holes(12) are formed, adhering an ion exchange resin(16) to at least one laminated plate and surrounding the laminated plates with a non woven fabric(15) and a main body having many holders, where one side and the other side of each filtering member are inserted and a perforation hole respectively formed on each holder to pass the air through between the holders.