发明名称 METHOD FOR FORMING FILM, METHOD OF MANUFACTURING ELECTRONIC DEVICE, FILM FORMING SYSTEM, ELECTRONIC DEVICE, AND ELECTRONIC APPARATUS
摘要 PURPOSE: A method for forming film, a method of manufacturing an electronic device, a film forming system, an electronic device, and an electronic apparatus are provided to improve a quality of an organic film effectively. CONSTITUTION: A film forming apparatus(10) forms a film of a material on a substrate. The film forming system includes an ionizer(13), a voltage supply, and a film former(16). The ionizer alters the material or a solution of the material into minute liquid droplets, ionizes or charges to vaporize the liquid droplets, and creates pseudo-molecular ions having a vapor state. The voltage supply supplies signals or voltages to electronic circuits that selectively set potentials of a plurality of electrodes included in the substrate for the pseudo-molecular ions. The film former bonds material ions included in the pseudo-molecular ions to the substrate.
申请公布号 KR20040090415(A) 申请公布日期 2004.10.22
申请号 KR20040020256 申请日期 2004.03.25
申请人 SEIKO EPSON CORPORATION 发明人 IMAMURA YOICHI
分类号 H05B33/10;B05B5/025;B05B5/053;B05B17/06;C23C14/04;C23C14/32;G09F9/30;H01L21/20;H01L51/50;H05B33/02;H05B33/12;H05B33/14;H05B33/26;(IPC1-7):H05B33/10 主分类号 H05B33/10
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