发明名称 APPARATUS FOR GENERATING AEROSOL TO REDUCE SIZE AND NOISE
摘要 PURPOSE: An apparatus for generating aerosol is provided to reduce size and noise by using a reversed Carnot cycle to cool a cleaning medium and using water to condense a refrigerant. CONSTITUTION: A transfer medium supply source is used for mixing a transfer medium with a cleaning medium of a cleaning medium supply source and supplying the transfer medium for transferring the cleaning medium. A nozzle is used for expanding the mixture of the transfer medium and the cleaning medium to form aerosol and injecting the aerosol as the cleaning solution. A cooler(30) is used for cooling the cleaning medium of the cleaning medium supply source by using a sealing cycle of a refrigerant.
申请公布号 KR20040090075(A) 申请公布日期 2004.10.22
申请号 KR20030023984 申请日期 2003.04.16
申请人 K.C. TECH CO., LTD. 发明人 HWANG, GWI JIN;KIM, SE HO
分类号 H01L21/304;(IPC1-7):H01L21/304 主分类号 H01L21/304
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