发明名称 |
APPARATUS FOR GENERATING AEROSOL TO REDUCE SIZE AND NOISE |
摘要 |
PURPOSE: An apparatus for generating aerosol is provided to reduce size and noise by using a reversed Carnot cycle to cool a cleaning medium and using water to condense a refrigerant. CONSTITUTION: A transfer medium supply source is used for mixing a transfer medium with a cleaning medium of a cleaning medium supply source and supplying the transfer medium for transferring the cleaning medium. A nozzle is used for expanding the mixture of the transfer medium and the cleaning medium to form aerosol and injecting the aerosol as the cleaning solution. A cooler(30) is used for cooling the cleaning medium of the cleaning medium supply source by using a sealing cycle of a refrigerant.
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申请公布号 |
KR20040090075(A) |
申请公布日期 |
2004.10.22 |
申请号 |
KR20030023984 |
申请日期 |
2003.04.16 |
申请人 |
K.C. TECH CO., LTD. |
发明人 |
HWANG, GWI JIN;KIM, SE HO |
分类号 |
H01L21/304;(IPC1-7):H01L21/304 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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