SILICON POLYMER COMPOSITION AND METHOD FOR MANUFACTURING INSULATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a silicon polymer composition for manufacturing an insulating film having increased adhesion property to a substrate and heat resistance and having high resistance and high strength, and to provide a method for manufacturing an insulating film.

SOLUTION: The silicon polymer composition contains polysilane having a repeat unit expressed by general formula (2) and at least either fine powder of SiO2fine powder and SiN fine powder. In formula (2), R1represents a substituted or unsubstituted aryl group or a substituted or unsubstituted alkyl group.

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