METHOD FOR MANUFACTURING TRANSFLECTIVE TYPE THIN-FILM TRANSISTOR LIQUID CRYSTAL DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an economical manufacturing method for transflective thin film transistor liquid crystal display device that improves optical characteristics as a microlens by forming an "uneven part" having a desired unevenness angle and further leaving no organic insulating film in a contact hole.

SOLUTION: The method includes the stages of: forming a gate electrode 110 on an insulating substrate 100 and forming a gate insulating film 120 thereupon; forming an active layer 130 and an ohmic contact layer 140 on the gate insulating film 120 and forming source/drain electrodes 150 and 152 thereupon such that they overlap with the ohmic contact layer 140; forming a protective film 160 thereupon and then forming a resin layer 180 on the protective film 160; forming a contact hole in one area of the resin layer 180 and an uneven part having a specified unevenness angle in another area by processing the resin layer 180 in an exposure stage of performing exposure with the same exposure quantity using one mask; and forming a reflecting electrode 188 on the entire upper surface of the resulting substrate.

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