| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared ray sensor array for enhancing infrared ray detection sensitivity. SOLUTION: This infrared ray sensor array comprises infrared ray sensors arranged in two axial directions substantially orthogonal to each other, the sensors each including an infrared ray detection part having a temperature detection film and supported by leg parts on a substrate, and an infrared ray absorption part supported by a support part on the detection part. Each of the infrared ray sensors comprises a first infrared ray sensor having plate-shaped infrared ray absorption parts disposed next to each other and apart by "a" from the substrate, and a second infrared ray sensor having infrared ray absorption parts provided on plate-shaped portions and around the plate-shaped portions and made up of a hood portion apart more than "a" from the substrate. The absorption parts of the first and second infrared ray sensors are disposed apart from each other in the vertical direction to the substrate. COPYRIGHT: (C)2005,JPO&NCIPI
|
