Method of producing lead zirconate titanate-based thin film, dielectric device and dielectric thin film

摘要

A lead zirconate titanate-based thin film is an epitaxial crystal thin film and has a chemical composition represented by the general formula Pb1-xLnxZryTi1-yO3 (wherein Ln represents any one selected from the group consisting of lanthanum, lanthanoid elements, niobium, calcium, barium, strontium, iron, manganese and tin; and 0<=x<1, 0.43<=y<=0.65) and whose orientation is {111} (including orientations whose tilt angle from the direction perpendicular to the substrate surface is within 15°).