Pump plunger and/or sealing ring for a pump for conveying fluids have a coating made from organometallic monomers containing halogens, silicon and carbon

摘要

Pump plunger (20) and/or sealing ring (22) for a pump have a coating made from organometallic monomers containing halogens, silicon and carbon. Independent claims are also included for the following: (1) Sealing ring with an additional coating; (2) Device for coating the components comprising an evacuated process chamber and a counter electrode; and (3) Process for coating the components.