<p>A method for manufacturing a plasma display panel is disclosed which enables to form a good film on a substrate of the plasma display panel by controlling the condition in a film-forming chamber properly. The method for manufacturing a plasma display panel comprises a film-forming step wherein a film is formed while a front substrate (3) is held by a substrate holder (30). The substrate holder (30) is repeatedly used for film formation. In the film-forming step, a substrate holder (30) which is repeatedly used and covered with films and another substrate holder (30) from which such adhering films are removed are used together in a deposition chamber (21) as the film-forming chamber, thereby suppressing changes in the vacuum degree or the like in the deposition chamber (21).</p>
申请公布号
WO2004090927(A1)
申请公布日期
2004.10.21
申请号
WO2004JP04900
申请日期
2004.04.05
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.;SHINOZAKI, ATSUSHI,;TAKASE, MICHIHIKO,;FURUKAWA, HIROYUKI,