发明名称 METHOD FOR MANUFACTURING PLASMA DISPLAY PANEL
摘要 <p>A method for manufacturing a plasma display panel is disclosed which enables to form a good film on a substrate of the plasma display panel by controlling the condition in a film-forming chamber properly. The method for manufacturing a plasma display panel comprises a film-forming step wherein a film is formed while a front substrate (3) is held by a substrate holder (30). The substrate holder (30) is repeatedly used for film formation. In the film-forming step, a substrate holder (30) which is repeatedly used and covered with films and another substrate holder (30) from which such adhering films are removed are used together in a deposition chamber (21) as the film-forming chamber, thereby suppressing changes in the vacuum degree or the like in the deposition chamber (21).</p>
申请公布号 WO2004090927(A1) 申请公布日期 2004.10.21
申请号 WO2004JP04900 申请日期 2004.04.05
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO. LTD.;SHINOZAKI, ATSUSHI,;TAKASE, MICHIHIKO,;FURUKAWA, HIROYUKI, 发明人 SHINOZAKI, ATSUSHI,;TAKASE, MICHIHIKO,;FURUKAWA, HIROYUKI,
分类号 C23C14/08;C23C14/56;H01J9/20;H01J11/10;H01L21/687;(IPC1-7):H01J9/46;H01J11/02;H01L21/68;C23C14/50 主分类号 C23C14/08
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