| 摘要 |
<p>A shower head structure characterized by comprising a shower head section opposed to the upper surface of a table in an evacuable treating vessel, a plurality of gas spout holes which open in the lower surface of the shower head for spouting a treating gas into the treating vessel, a temperature observation through-hole which opens in the lower surface of the shower head so as to be opposed to the upper surface of the table, a transparent observation window which hermetically seals the upper end of the temperature observation through-hole, a radiation thermometer disposed on the upper surface of the transparent observation window, an adhesion preventive gas supply path communicating with the temperature observation through-hole for supplying an adhesion preventive gas into the temperature observation through-hole to prevent a film from adhering to the transparent observation window, wherein the adhesion preventive gas supply path communicates with the temperature observation through-hole through a spout nozzle for spouting the adhesion preventive gas to the transparent observation window.</p> |
