| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor dynamics quantity sensor which can prevent a displacement section from being broken when being sucked to a collet, and to provide its carrying method and a collet sucking method. SOLUTION: The displacement section 20 composed of a movable electrode 17 and stationary electrodes 18, 19 is formed on a semiconductor substrate 12. Capacitance values between the movable electrode 17 and the stationary electrodes 18, 19 are varied by the displacement of the movable electrode 17 made in accordance with external accelerations applied thereon, thereby enabling the applied acceleration to be detected on the basis of changes in the capacitance value. A plurality of rectangular-shaped sections to be sucked 32 are disposed at four corner regions on the surface of the semiconductor substrate 12, and the sections to be sucked 32 are attached to a collet chuck, thereby attaching / carrying the semiconductor acceleration sensor 11 without damaging the displacement section 20. COPYRIGHT: (C)2005,JPO&NCIPI |
