| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating vanish of polybenzooxazole precursor excellent in the external appearance and the uniformity in film thickness, and to provide an insulating film using the same. SOLUTION: A coating varnish for an insulating film comprises (A) a polybenzooxazole obtained by reacting a diaminophenol compound with a dicarboxylic acid compound and (B) an organic solvent having a solubility parameter of 17.0 to 27.0 (Mpa)<SP>1/2</SP>which can dissolve or disperse component. Moreover, the insulating film is formed by using the coating varnish, furthermore, by dehydrating and condensing. COPYRIGHT: (C)2005,JPO&NCIPI
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