| 摘要 |
PROBLEM TO BE SOLVED: To solve such problems that even if electrode films facing each other via a piezoelectric film are formed as a piezoelectric element and a voltage is applied, its piezoelectric characteristic is low and stability is bad, and even if the piezoelectric element is used for an ink jet recording head, satisfactory discharge velocity cannot be obtained and therefore information output speed to a recording medium is low and variation arises in discharge velocity of each ink and highly fine image cannot be obtained. SOLUTION: In the piezoelectric element, electrode films which face each other via a piezoelectric film are laminated in the surface of the piezoelectric film consisting of piezoelectric ceramics. The film thickness of the piezoelectric film is 1 to 20μm, the crystal deficiency part occupied area of piezoelectric ceramics in the piezoelectric film surface is at most 5% per unit area, the thickness of the electrode film is 0.1μm or more and the thickness of the electrode film is 60% or less to the thickness of the piezoelectric film. COPYRIGHT: (C)2005,JPO&NCIPI
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