| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material vaporization/supply device for securely removing bubbles mixed in a liquid material by a vacuum foaming phenomenon and the like, always and stably supplying the desired flow rate of the liquid material to a vaporizer, always vaporizing the liquid material in the vaporizer and stably supplying vaporized gas to a prescribed use point. SOLUTION: In the liquid material vaporization supply device, inert gas IG is press-fitted to the liquid material tank 1, the liquid material LM in the liquid material tank 1 is supplied to the vaporizer 10, and the liquid material LM is vaporized in the vaporizer 10. A liquid sealing-type bubble trap 5 is disposed between the liquid material tank 1 and the vaporizer 10. A liquid material supply pipe 3 whose one end is connected to the liquid sealing-type bubble trap 5 and which supplies the liquid material LM is connected in a state where the other end is immersed in liquid in a trap tank 5A of the liquid sealing-type bubble trap 5. A liquid material supply pipe 7 to the vaporizer 10 is connected to a lower side of the trap tank 5A. COPYRIGHT: (C)2005,JPO&NCIPI
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