发明名称 |
PROJECTION SYSTEM AND METHOD FOR USING THE SAME, ESPECIALLY REGARDING TO REDUCING INFLUENCE OF VIBRATION AND DISTURBANCE |
摘要 |
PURPOSE: A projection system and a method for using the same are provided to realize a projection system less sensitive to vibration and disturbance. CONSTITUTION: A projection system(PL) includes a processing unit(40) formed to communicate with a plurality of sensors(11). The processing unit communicates with position setting devices(PM, PW) formed to adjust a position of a first object(MA) or second object(W) based on a measured spatial orientation of a plurality of projection devices(10). The projection system compensates an error in setting positions of the projection devices. The projection devices apply signals to a servo motor controlling positions of the first object and the second object to compensate disturbance.
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申请公布号 |
KR20040089575(A) |
申请公布日期 |
2004.10.21 |
申请号 |
KR20040025255 |
申请日期 |
2004.04.13 |
申请人 |
ASML NETHERLANDS B.V. |
发明人 |
LEENDERS MARTINUS HENDRIKUS ANTONIUS;COX HENRIKUS HERMAN MARIE;LEVASIER LEON MARTIN |
分类号 |
G02F1/13;F16F15/02;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G02F1/13 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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