发明名称 PROJECTION SYSTEM AND METHOD FOR USING THE SAME, ESPECIALLY REGARDING TO REDUCING INFLUENCE OF VIBRATION AND DISTURBANCE
摘要 PURPOSE: A projection system and a method for using the same are provided to realize a projection system less sensitive to vibration and disturbance. CONSTITUTION: A projection system(PL) includes a processing unit(40) formed to communicate with a plurality of sensors(11). The processing unit communicates with position setting devices(PM, PW) formed to adjust a position of a first object(MA) or second object(W) based on a measured spatial orientation of a plurality of projection devices(10). The projection system compensates an error in setting positions of the projection devices. The projection devices apply signals to a servo motor controlling positions of the first object and the second object to compensate disturbance.
申请公布号 KR20040089575(A) 申请公布日期 2004.10.21
申请号 KR20040025255 申请日期 2004.04.13
申请人 ASML NETHERLANDS B.V. 发明人 LEENDERS MARTINUS HENDRIKUS ANTONIUS;COX HENRIKUS HERMAN MARIE;LEVASIER LEON MARTIN
分类号 G02F1/13;F16F15/02;G03F7/20;G03F9/00;H01L21/027;(IPC1-7):G02F1/13 主分类号 G02F1/13
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