| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum pump capable of preventing the condensation of a condensable gas therein with lower running costs. SOLUTION: In a dry pump having a pump housing 11, in which a plurality of pump rooms are formed, the pump housing 11 comprises therein a purge gas channel 32 for supplying a purge gas to purge gas supply ports 40 and 41 provided in fifth and fourth stage pump rooms 19 and 20, respectively. When the dry pump is operated, the temperature of the pump housing 11 is increased, so that it is possible to preheat the purge gas and supply the preheated purge gas to the pump rooms 40 and 41 by circulating the purge gas in the purge gas channel 32. COPYRIGHT: (C)2005,JPO&NCIPI
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