| 摘要 |
The invention relates to a high frequency plasma jet source (1) comprising a space (3) for accommodating a plasma, electrical means (8, 9) for applying a voltage to said high frequency plasma jet source (1) so as to ignite and obtain the plasma, means (4) for extracting a plasma jet (I) from the plasma space (3), and an outlet port which is separated from the vacuum chamber (7) by means of an extraction grid (4). The plasma jet (I) emerges from the high frequency plasma jet source (1) with essentially divergent radiation characteristics. The invention further relates to a method for irradiating a surface with a plasma jet (I) of a high frequency plasma jet source, said plasma jet (I) being divergent. |
