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发明名称
Absetzung von Kupfer auf einer aktivierten Oberfläche eines Substrats
摘要
申请公布号
DE69920157(D1)
申请公布日期
2004.10.21
申请号
DE19996020157
申请日期
1999.11.30
申请人
IMEC (INTERUNIVERSITY MICROELECTRONICS CENTER) VZW, LEUVEN
发明人
PALMANS, ROGER;LANTASOV, YURI
分类号
C23C18/40;(IPC1-7):C23C18/40
主分类号
C23C18/40
代理机构
代理人
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地址
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