| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum chuck capable of absorbing an object to be absorbed whose part to be absorbed is differently scaled, and increasing its absorbing force, and making uniform the absorbing force as a whole, and realizing the uniform grinding of the object to be absorbed. SOLUTION: The vacuum chuck 20 is provided with an absorber 21 constituted of porous ceramic, and equipped with a holding face 24 for absorbing and holding an object 15 to be absorbed and a sealing body 22 for sealing almost the whole face excluding the holding face 24 and sucking hole corresponding part of the absorber 21, and configured to absorb the object 15 to be absorbed whose part to be absorbed is differently scaled. Then, one or more barriers 26a and 26b constituted of a precise body whose shape is almost the same as that of the outer edge of the object to be absorbed when it is flatly viewed are formed so as to be continuously extended from the opposite face of the holding face 24 to the holding face 24 inside the absorber 21, and a distance between the portions of the barriers 26a and 26b which are the closest to the holding face 24 and the holding face 24 is set so as to be ranging from 3 to 15mm. COPYRIGHT: (C)2005,JPO&NCIPI |
