| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that conventional methods are difficult to detect only specific foreign substances and have the necessity for visually observing and selecting them from detected foreign substances when inspecting the foreign substances on an object to be inspected 1. SOLUTION: The object to be inspected 1 is heated, and infrared light emitted from the object to be inspected 1 is detected, and the foreign substances are detected on the basis of the detected infrared light, and the specific foreign substances are selected from the detected foreign substances, thereby enabling the specific foreign substances to be detected, which cause defective products to be made. In addition, changes in infrared light with time, which is emitted from the specific foreign substance, are detected, thereby enabling adhesion states to be detected, where the foreign substances adhere to the object to be inspected 1. COPYRIGHT: (C)2005,JPO&NCIPI
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