| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrical physical property value measurement method and a measuring tool for measuring the electrical physical property value of a dielectric substrate having a high dielectric constant and a thick dielectric substrate at a frequency band to be measured, and for greatly improving the measurement precision of the physical property value of the dielectric substrate. SOLUTION: A dielectric substrate 31 is arranged between a pair of closed-end cylindrical conductors 32a, 32b having different depths so that it faces each opening to compose a cylindrical cavity resonator, the resonance frequency and unloaded Q of the TE mode of the cylindrical cavity resonator are measured, and the electrical physical propert values of the dielectric substrate 31 are measured from the resonance frequency and the unloaded Q. COPYRIGHT: (C)2005,JPO&NCIPI
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