| 摘要 |
PROBLEM TO BE SOLVED: To provide a method resolving a problem of difficulty in preparing a sufficiently dense Y<SB>2</SB>O<SB>3</SB>sintered compact in a large furnace for mass production because temperature control is difficult due to high firing temperature of Y<SB>2</SB>O<SB>3</SB>. SOLUTION: This corrosion resistant member comprises a Y<SB>2</SB>O<SB>3</SB>sintered compact containing not less than 99.0 mass% Y<SB>2</SB>O<SB>3</SB>, not less than 0.01 mass% but less than 1 mass% Ti in terms of an oxide, not higher than 300 ppm SiO<SB>2</SB>as an unavoidable impurity, not higher than 100 ppm Fe<SB>2</SB>O<SB>3</SB>, and 100 ppm alkali metal oxide, and it is manufactured as a Y<SB>2</SB>O<SB>3</SB>sintered compact having a dielectric loss of not higher than 2×10<SP>-4</SP>for a microwave of 10 MHz to 5 GHz. COPYRIGHT: (C)2005,JPO&NCIPI
|
