PASTE COATING DEVICE AND PASTE COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a paste coating device and a paste coating method capable of utmost preventing from lowering the product quality and coating a paste in good condition. SOLUTION: A coating head 6 is movably supported in the horizontal direction at a beamlike member 5a of a gantry type frame 5 arranged over a stage 4 via a guiding device 8. The guiding device 8 has a guide rail 8a1 fixed to the beamlike member 5a and a movable platform 8a2 fixed to the coating head 6 slidably arranged on the guide rail 8a1. And a plurality of vacuum suction holes 5b is arranged in a prescribed interval along with the guide rail 8a1 in the beamlike member 5a and each of vacuum suction holes 5b is connected to a vacuum source via pipings having a solenoid valve. COPYRIGHT: (C)2005,JPO&NCIPI