摘要 |
<p><P>PROBLEM TO BE SOLVED: To manufacture a photo-electromotive element of high conversion efficiency at high yield. <P>SOLUTION: A stacked photo-electromotive element has an arrangement wherein layers are stacked in the order of a metal layer 103 formed on a support 102, a conductive layer 104 whose lower portion is transparent, a first n layer 105 consisting of non-single crystal silicon, a first i layer 106 consisting of microcrystal silicon, a first p layer 108 consisting of non-single crystal silicon, a second n layer 109 consisting of non-single crystal silicon, a second i layer 110 consisting of microcrystal silicon, and a second p layer 112 consisting of non-single crystal silicon. In the element, the first i layer 106 and the second i layer 110 are allowed to comprise phosphorus (P). Letting a content of phosphorus with respect to silicon in the first i layer 106 be R1, and that in the second i layer 110 be R2, the contents are adjusted to establish a relation R2<R1. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |