| 摘要 |
PROBLEM TO BE SOLVED: To prevent a glass target from being damaged even at high output in sputtering; and to suppress that the concentration of a sodium compound in the glass becomes high in positive electrode ligation. SOLUTION: A low melting glass film 2 is formed by applying a low melting glass material on one surface of a first glass substrate 1 by a silk-screen printing method, and then the materials are fired. Subsequently, a low melting glass thin film 5 is formed on a second glass substrate 4 to be coated with a coating by performing sputtering by using the low melting glass film 2 fired as the target. Further, a voltage is impressed between a silicon substrate 6 and the second glass substrate 4 while bringing the low melting glass thin film 5 into contact with the silicon substrate 6. COPYRIGHT: (C)2005,JPO&NCIPI
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