| 摘要 |
PROBLEM TO BE SOLVED: To provide a hot plate unit in which no leakage occurs from the wiring of resistance heat generating elements even when the inside of a supporting container becomes a high temperature. SOLUTION: This hot plate unit comprises a ceramic heater constituted by forming the resistance heat generating elements on or in a ceramic substrate and connecting external terminals to the ends of the heat generating elements and a ceramic supporting container which supports the heater. The supporting container is composed of a bottomed annular or polygonal supporting section having a through hole in its bottom and a projecting body joined to the through hole forming section of the supporting section. On the bottom of the supporting section constituting the supporting container, a plurality of projections are formed and the ceramic heater is fixed to the bottom through the projections. At the same time, the wiring connected to the external terminals is led out through the projecting body of the supporting container. COPYRIGHT: (C)2005,JPO&NCIPI
|
