发明名称 |
ELECTRON BEAM DRAWING METHOD, METHOD FOR MANUFACTURING MASTER PATTERN, MASTER PATTERN, METHOD FOR MANUFACTURING MOLD, MOLD, OPTICAL DEVICE AND ELECTRON BEAM DRAWING APPARATUS |
摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam drawing method by which an image is drawn in a shorter time and the drawing feature can be uniformly maintained without being influenced by the scanning position of the electron beam in the drawing region. SOLUTION: Frequency signals having controlled amplitudes according to the scanning position (position of a superposition quantity division field) of the electron beam in a specified drawing region (drawing field) are superposed on the input signal to a deflector which deflects the electron beam so as to oscillate an electron beam B in a sub scanning direction (Y direction in the figure) in the drawn plane (surface of a resist layer L) of a substrate 2. Thereby, the electron beam B is made to scan in the main scanning direction (X direction in the figure) while meandering, and the degree of meandering is controlled to a value according to the position of the superposition quantity division field in the field. COPYRIGHT: (C)2005,JPO&NCIPI
|
申请公布号 |
JP2004294774(A) |
申请公布日期 |
2004.10.21 |
申请号 |
JP20030087219 |
申请日期 |
2003.03.27 |
申请人 |
KONICA MINOLTA HOLDINGS INC |
发明人 |
MASUDA OSAMU;FURUTA KAZUMI |
分类号 |
G02B5/18;G03F7/20;H01J37/147;H01J37/305;(IPC1-7):G03F7/20 |
主分类号 |
G02B5/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|