APPARATUS AND METHOD FOR MEASURING MODULATION TRANSFER FUNCTION

摘要

PROBLEM TO BE SOLVED: To accurately measure the modulation transfer function (MTF) values or MTF-defocus characteristics in a short time. SOLUTION: This MTF measuring apparatus 1 is provided with a magnifying optical system 10 provided with both an infinity correction type objective lens 10a and an infinity correction type imaging lens 10b arranged in such a way that their optical axes are made parallel or matched with the optical axis A of a lens to be inspected R in order to magnify an image formed by the lens to be inspected R; a moving mechanism 20 capable of moving the objective lens 10a in the direction of the optical axis A; a solid-state image sensor 30 for imaging an object image formed by the imaging lens 10b; and an arithmetic part 40 for computing an MTF value on the basis of an output signal of the object image imaged by the solid-state image sensor 30 while moving the objective lens 10a by the moving mechanism 20. COPYRIGHT: (C)2005,JPO&NCIPI