CLAMPING DEVICE, AND VERTICAL DIRECTION DRIVING POSITIONING DEVICE WITH TILT FUNCTION HAVING IT

摘要

PROBLEM TO BE SOLVED: To provide a clamping device allowing translation and tilt operation in the vertical direction and elimination of positional displacement even when horizontal or downward acceleration works. SOLUTION: The clamping device has three sets of combinations of balls 13-15 placed on supporting members 107-109 and clamp shafts 16-18 having ball receiving sections 16-1 to 18-1 in their lower parts and butting them on the upper parts of the balls. The clamp shafts are formed of the supporting members and shaft sections 16-2 to 18-2 extending upward from there. Holders 104-106 for holding the combinations of the balls and the clamp shafts in the state where the shaft sections are projected upward oscillatably are fixed to the supporting member side. Belleville springs 101-103 for energizing the receiving sections downward are disposed between the receiving sections and the holders. COPYRIGHT: (C)2005,JPO&NCIPI