Systems of and methods for capturing a plurality of one-dimensional images representative of substantially all of the surface of a substrate within a single revolution of a rotating platen holding a polishing pad in operative contact with the surface of the substrate during chemical-mechanical planarization. A two-dimensional image comprising frame data, which may comprise a spectral image, is derived from the plurality of one-dimensional images. The frame data provides information useful for subsequent chemical-mechanical processing of the substrate.
申请公布号
WO2004090502(A2)
申请公布日期
2004.10.21
申请号
WO2004US10326
申请日期
2004.04.01
申请人
FILMETRICS, INC.;CHALMERS, SCOTT A.;GEELS, RANDALL S.;BIBBY, THOMAS F. A.
发明人
CHALMERS, SCOTT A.;GEELS, RANDALL S.;BIBBY, THOMAS F. A.