STAGE DEVICE, EXPOSURE DEICE, AND METHOD OF PRODUCING DEVICE

摘要

A drive device (DA) has movable elements (44A-44F) connected to a stage (WST1) and stationary elements (46A-46F) arranged in one predetermined axial direction. The drive device (DA) causes the stage to generate drive force parallel to a two-dimensional surface and drives the stage in a direction in the two-dimensional surface and in a direction inclined to the two-dimensional surface. The structure above makes it possible that the stage is moved in the directions in the two-dimensional surface and inclined surface without employing, as conventionally made, a structure having a two-dimensionally moving stage and a table movable on the stage in the inclined direction, and the stage can be formed as a simple integrated body. As a consequence, the combination of a two dimensionally moving stage and a table has no possibility of declining positional controllability of the table and stage.