HOLDER, OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

摘要

An optical member can be held at an adequate position considering the glide of a crystal material of cubic system such as fluorite, and deformation of the optical member due to glide is suppressed. Holders (Ha, Hb) hold transparent optical members in such a way that the crystal orientation <111> of the transparent optical members made of a crystal material of cubic system is generally aligned with the optical axis of the transparent optical members. The transparent optical members are held at regions (for example, the regions corresponding to the crystal orientation <211>) substantially far from the crystal orientation <110>. Alternatively, the transparent optical members are held at regions (for example, the region generally at the midpoint between the crystal orientation <110> and the crystal orientation <211> adjacent to the crystal orientation <110>) substantially far from the crystal orientation <110> and the crystal orientation <211>.