发明名称 |
USE OF ELECTRONIC SPECKLE INTERFEROMETRY FOR DEFECT DETECTION IN FABRICATED DEVICES |
摘要 |
Electronic speckle interferometry is used to detect submicron-sized indication in fabricated devices, such as membranes. Indications include indentations, deformations or defects. For example, disbonds between a membrane surface and a bonded edge surface can be detected. An acoustic source can be used to excite the membrane. The acoustic source can produce a sine wave to vibrate the membrane. An interference image of the membrane is created to show whether submicron-sized defects exist in the membrane.
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申请公布号 |
WO03067246(A9) |
申请公布日期 |
2004.10.21 |
申请号 |
WO2003US03408 |
申请日期 |
2003.02.03 |
申请人 |
MILLIPORE CORPORATION;PETERSON, MICHAEL, L., JR |
发明人 |
PETERSON, MICHAEL, L., JR;DILEO, ANTHONY, J. |
分类号 |
G01N29/12;G01B9/02;G01B11/16;G01N21/45;G01N21/88;G01N29/24;G01N29/44;G01N29/50;(IPC1-7):G01N29/14 |
主分类号 |
G01N29/12 |
代理机构 |
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代理人 |
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地址 |
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