METHOD OF MANUFACTURING MICROSTRUCTURE, DEVICE, OPTICAL ELEMENT, INTEGRATED CIRCUIT, AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing a microstructure in which the manufacturing time is shortened and the manufacturing cost is reduced when forming a desired pattern by using liquid materials, and to provide an optical element, an integrated circuit, and electronic equipment .

SOLUTION: When liquid materials are used to form a pattern of a desired shape on the surface of a substrate 100, a substrate or the substrate provided with a lyophilic film 12 is subjected to liquid-repelling treatment to provide a liquid repellent film 11. Thereafter, a plurality of insular liquid-repellent parts or a plurality of insular lyophilic parts are formed in a desired pattern region.

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