| 摘要 |
PROBLEM TO BE SOLVED: To effectively prevent the occurrence of cracking and stripping on a lower part cladding layer 2 and an upper part cladding layer 4, in an optical waveguide which is provided with a core layer 3 which becomes a light propagation region, the upper part cladding layer 4 covering the circumference of the core layer 3 and the lower part cladding layer 2, and is formed in such a manner that the upper part cladding layer 4 accompanies a volume shrinkage. SOLUTION: A stress relaxation layer 5 comprising a material of which the storage modulus is smaller than that of the upper cladding layer 4 is formed between the upper cladding layer 4 and the lower cladding layer 2 on at least one part of the region with which the upper part cladding layer 4 and lower part cladding layer 2 are brought into contact with each other. COPYRIGHT: (C)2005,JPO&NCIPI |
