| 摘要 |
PROBLEM TO BE SOLVED: To provide a heater structure excellent in a response property of heating/cooling, temperature uniformity and reliability and precisely controlling a temperature, and also to provide a variety of functional devices using the heater structure. SOLUTION: The heater structure comprises a crystal diamond layer 12, an amorphous resistive layer 13 composed of a non-crystal diamond area thermally contacting to the diamond layer 12, and a pair of electrodes 21a, 21b electrically connected to the resistive layer 13, and each of the functional device has a flow path (micro flow path) 25 of energy flows in contact with the diamond layer 12. Here, 'the flow of energy' is a flow of molecules in the micro flow path 25, that is, a flow of a fluid. COPYRIGHT: (C)2005,JPO&NCIPI |
