METHOD FOR MANUFACTURING MATRIX OF MOLD FOR MOLDING OPTICAL ELEMENT, MATRIX, MOLD FOR MOLDING OPTICAL ELEMENT AND COATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing the matrix of a mold for molding an optical element, capable of removing the clogging with a resist and capable of applying a coating agent while well keeping the flatness of a base material, the matrix, a mold for molding the optical element and a coating apparatus. SOLUTION: Since a circular linear groove 43 is provided to a spin coater chuck 40 in order to suck and hold the base material 10, the film thickness irregularity of a resist L can be suppressed and, even if the resist L flows in the linear groove 43, the resist L can be easily removed and labor at the time of production can be reduced. COPYRIGHT: (C)2005,JPO&NCIPI