发明名称 |
Substratträger des Vakuumtyps |
摘要 |
A wafer holding device of vacuum attraction type, includes a structural member (1) having a protrusion (2) for supporting a wafer; and elastic members (3') made of a material having an elasticity modulus smaller than that of the wafer and that of the structural member, the elastic members being distributed on a wafer attraction plane of the structural member. <IMAGE> |
申请公布号 |
DE69133413(D1) |
申请公布日期 |
2004.10.21 |
申请号 |
DE1991633413 |
申请日期 |
1991.05.03 |
申请人 |
CANON K.K., TOKIO/TOKYO |
发明人 |
SAKAMOTO, EIJI;EBINUMA, RYUICHI;HARA, SHINICHI;MARUMO, MITSUJI |
分类号 |
C30B25/12;C30B31/14;H01L21/683;(IPC1-7):H01L21/00;C23C14/50 |
主分类号 |
C30B25/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|