摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new method for producing a sulfonium salt useful as an acid-generating agent for a resist, or a cationic photopolymerization initiator. <P>SOLUTION: The method for producing the sulfonium salt represented by general formula [4] comprises reacting a compound represented by general formula [1]:R<SP>1</SP>-M<SB>1</SB>X<SB>1</SB>with a dialkyl sulfite represented by general formula [2], and reacting the product with a strong acid represented by general formula [3]: HA<SB>1</SB>or a salt thereof. The method for producing the sulfonium salt represented by general formula [8] comprises reacting the compound represented by general formula [1] with the dialkyl sulfite represented by general formula [2], reacting the product with a hydrohalogenic acid represented by general formula [5]: HX<SB>2</SB>to provide a compound represented by general formula [6], and reacting the compound represented by general formula [6] with an acid represented by general formula [7]:HA<SB>2</SB>or a salt thereof. <P>COPYRIGHT: (C)2005,JPO&NCIPI |